EIS capacitor sensor, with TiO2 dielectric, applied in the evaluation of phosphate in wastewater

This work presents the development of an Electrolyte-Insulator-Semiconductor (EIS) device with a built-in reference electrode to detect phosphate in wastewater. The idea developing this comes from need improve use water processed by effluent treatment plant. After process, fraction can be used as wastewater, cannot consumed, however it for other purposes including cleaning public spaces, such streets and squares. In fabrication process EIS device, titanium oxide (TiO2) deposited on silicon substrate was sensor element, nitride (TiN) electrode. Both materials were reactive sputtering process. Aluminum (Al) back slide evaporation. Preliminary results structural electrical characterizations indicate that manufactured has good sensitivity ions (66 mV/ppm). is due quality film, which shown using Raman spectroscopy, atomic force microscopy (AFM) X-ray diffraction (XRD) techniques, addition measurements.